Fluid transportation actuator

ABSTRACT

A fluid transportation actuator is disclosed and includes a silencing jet orifice plate, a chamber frame, an actuator, an insulation frame and a conductive frame. The silencing jet orifice plate includes a silencing plate, a suspension plate and a central aperture. The suspension plate is permitted to undergo a bending vibration. The central aperture is formed on a center of the suspension plate. The silencing plate is disposed and fixed in the central aperture disposed at the center of the suspension plate. The chamber frame is stacked on the suspension plate. The actuator is stacked on the chamber frame. The actuator generates the bending vibration in a reciprocating manner as a voltage is applied thereto. The actuator includes a piezoelectric-thin-plate pin. The insulation frame is stacked on the actuator. The conductive frame is stacked on the insulation frame and includes a conductive-frame pin.

FIELD OF THE INVENTION

The present disclosure relates to a fluid transportation actuator, andmore particularly to a fluid transportation actuator assembled andcombined with different metal materials.

BACKGROUND OF THE INVENTION

In the prior art, fluid transportation actuators are mainly constructedby stacking conventional mechanical components, and each mechanicalcomponent is miniaturized or thinned to achieve the goal ofminiaturization and thinning of the overall device. However, while theconventional mechanical components are miniaturized, it is not easy tocontrol the dimensional accuracy, and the assembly accuracy is alsodifficult to control. It results in different product yields and evenunstable fluid flow rates. In addition, while the mechanical componentsare miniaturized, the single-material fluid transportation actuator hasthe problem of insufficient structural toughness during being driven andeasy to result in the problems of interference and unrecognizable of thedriving point.

Furthermore, in the conventional fluid transportation actuator, theoutput fluid cannot be converged effectively or the element size is toosmall results in insufficient fluid propulsion force. It leads to theproblem of insufficient amount of fluid transportation.

SUMMARY OF THE INVENTION

An object of the present disclosure is to provide a fluid transportationactuator. In accordance with an aspect of the present disclosure, thefluid transportation actuator includes a silencing jet orifice plate, achamber frame, an actuator, an insulation frame and a conductive frame.The silencing jet orifice plate includes a silencing plate, a suspensionplate and a central aperture. The suspension plate is permitted toundergo a bending vibration. The central aperture is formed on a centerof the suspension plate. The silencing plate is disposed and fixed onthe central aperture disposed at the center of the suspension plate. Thechamber frame is carried and stacked on the suspension plate. Theactuator is carried and stacked on the chamber frame. The actuatorgenerates the bending vibration in a reciprocating manner as a voltageis applied thereto, and includes a piezoelectric-thin-plate pin. Theinsulation frame is carried and stacked on the actuator. The conductiveframe is carried and stacked on the insulation frame, and includes aconductive-frame pin. A resonance chamber is collaboratively defined bythe actuator, the chamber frame and the silencing jet orifice plate.When the silencing jet orifice plate is driven by the actuator inresonance, the suspension plate of the silencing jet orifice plate isvibrated and displaced in the reciprocating manner, so as to achievefluid transportation.

BRIEF DESCRIPTION OF THE DRAWINGS

The above contents of the present disclosure will become more readilyapparent to those ordinarily skilled in the art after reviewing thefollowing detailed description and accompanying drawings, in which:

FIG. 1 is a perspective exploded view illustrating a fluidtransportation actuator according to an embodiment of the presentdisclosure and taken from a first perspective;

FIG. 2 is a perspective exploded view illustrating the fluidtransportation actuator according to the embodiment of the presentdisclosure and taken from a second perspective;

FIG. 3 is a top view illustrating the fluid transportation actuatoraccording to the embodiment of the present disclosure;

FIG. 4 is a bottom view illustrating the fluid transportation actuatoraccording to the embodiment of the present disclosure;

FIG. 5 is a schematic diagram showing the dimensions of the fluidtransportation actuator shown in FIG. 3;

FIG. 6 is a schematic diagram showing the four corners of the fluidtransportation actuator shown in FIG. 3;

FIG. 7 is a cross-sectional view illustrating the fluid transportationactuator along the dash line AA; and

FIG. 8 is a schematic exploded view showing the respective dimensions ofthe fluid transportation actuator shown in FIG. 6.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

The present disclosure will now be described more specifically withreference to the following embodiments. It is to be noted that thefollowing descriptions of preferred embodiments of this disclosure arepresented herein for purpose of illustration and description only. It isnot intended to be exhaustive or to be limited to the precise formdisclosed.

In all the accompanying drawings of the present disclosure, if corner'sorientations (M, N, O, P) or edge's orientations (W, X, Y, Z) are markedon at the lower left, it is to define the orientations of the fluidtransportation actuator, so as to define the described corner or thedescribed edge accurately.

A fluid transportation actuator is provided in the present disclosure.Please refer to FIGS. 1 and 2. In the embodiment, the fluidtransportation actuator 21 includes a silencing jet orifice plate 211, achamber frame 212, an actuator 213, an insulation frame 214 and aconductive frame 215. The silencing jet orifice plate 211 includes asilencing plate 211 a, a suspension plate 211 b and a central aperture211 c. The suspension plate 211 b is permitted to undergo a bendingvibration. The central aperture 211 c is formed on a center of thesuspension plate 211 b. The silencing plate 211 a is disposed and fixedon the central aperture 211 c formed at the center of the suspensionplate 211 b. The chamber frame 212 is carried and stacked on thesuspension plate 211 b. The actuator 213 is carried and stacked on thechamber frame 212. The actuator 213 generates the bending vibration in areciprocating manner as a voltage is applied thereto, and includes apiezoelectric-thin-plate pin 213 e. The insulation frame 214 is carriedand stacked on the actuator 213. The conductive frame 215 is carried andstacked on the insulation frame 214, and includes a conductive-frame pin215 e. A resonance chamber is collaboratively defined by the actuator213, the chamber frame 212 and the silencing jet orifice plate 211. Whenthe silencing jet orifice plate 211 is driven by the actuator 213 inresonance, the suspension plate 211 b of the silencing jet orifice plate211 is vibrated and displaced in the reciprocating manner, so as toachieve fluid transportation. In the embodiment, the actuator 213includes a piezoelectric thin plate 213 a, a piezoelectric thick plate213 b and a piezoelectric element 213 c. The piezoelectric thin plate213 a is carried and stacked on the chamber frame 212. Preferably butnot exclusively, the piezoelectric-thin-plate pin 213 e is a protrusionof the piezoelectric thin plate 213 a. The piezoelectric thick plate 213b is carried and stacked on the piezoelectric thin plate 213 a. Thepiezoelectric element 213 c is carried and stacked on the piezoelectricthick plate 213 b. When the voltage is applied to the piezoelectricelement 213 c, the piezoelectric thin plate 213 a and the piezoelectricthick plate 213 b are driven to generate the bending vibration in thereciprocating manner.

In the embodiment, the fluid transportation actuator 21 includes thesilencing jet orifice plate 211, the chamber frame 212, the actuator213, the insulation frame 214 and the conductive frame 215, which aresequentially stacked. The silencing jet orifice plate 211 includes asilencing plate 211 a, a suspension plate 211 b and a central aperture211 c. The suspension plate 211 b has four piezoelectric-thin-platecorners (R1M, R1N, R1O and R1P). When the suspension plate 211 b isdriven by electricity, it is permitted to undergo a bending vibration.The central aperture 211 c is formed on a center of the suspension plate211 b. The silencing plate 211 a is disposed adjacent to and above thecentral aperture 211 c disposed at the center of the suspension plate211 b. The chamber frame 212 has four chamber-frame corners (R2M, R2N,R2O and R2P). The chamber frame 212 is carried and stacked on thesuspension plate 211 b. The actuator 213 is carried and stacked on thechamber frame 212. In the embodiment, the actuator 213 includes apiezoelectric thin plate 213 a, a piezoelectric thick plate 213 b and apiezoelectric element 213 c. When a voltage is applied to the actuator213, the actuator 213 generates the bending vibration in a reciprocatingmanner. The actuator 213 further includes a piezoelectric-thin-plate pin213 e. Preferably but not exclusively, the piezoelectric-thin-plate pin213 e is a protrusion of the piezoelectric thin plate 213 a forreceiving the applied voltage. The piezoelectric thin plate 213 a iscarried and stacked on the chamber frame 212. The piezoelectric thickplate 213 b is carried and stacked on the piezoelectric thin plate 213a. The piezoelectric element 213 c is carried and stacked on thepiezoelectric thick plate 213 b. When the voltage is applied to thepiezoelectric element 213 c, the piezoelectric thin plate 213 a and thepiezoelectric thick plate 213 b are driven to generate bending vibrationin the reciprocating manner. In the embodiment, the insulation frame 214has four insulation-frame corners (R4M, R4N, R4O and R4P). Theinsulation frame 214 is carried and stacked on the actuator 213.Preferably but not exclusively, the insulation frame 214 is carried andstacked on the piezoelectric thin plate 213 a of the actuator 213. Theconductive frame 215 is carried and stacked on the insulation frame 214,and includes a conductive-frame pin 215 e. Preferably but notexclusively, the conductive-frame pin 215 e is a protrusion of theconductive frame 215 for receiving the applied voltage. In theembodiment, a resonance chamber is collaboratively defined by theactuator 213, the chamber frame 212 and the silencing jet orifice plate211. When the silencing jet orifice plate 211 is driven by the actuator213 in resonance, the suspension plate 211 b of the silencing jetorifice plate 211 is vibrated and displaced in the reciprocating manner,so as to achieve fluid transportation.

In the fluid transportation actuator 21 of the present disclosure, thepiezoelectric thin plate 213 a and the piezoelectric thick plate 213 bare made of two metals having different thermal expansion coefficients,two different flexibilities and two different rigidities, and both arenot stainless steel.

Notably, the piezoelectric thin plate 213 a and the piezoelectric thickplate 213 b are made of two metals having different thermal expansioncoefficients. The actuator 213 made of metal materials having differentthermal expansion coefficients can avoid to generate two adjacentresonance frequencies, so as to prevent the driving frequency offsetresult from the adjacent resonance frequencies. At the same time, theimpedance (resistance and reactance) of the actuator 213 is reduced, soas to achieve effective electric driving and improve the workingefficiency of the actuator 213. Moreover, comparing to the actuatorsmade of a single material (such as stainless steel) in the prior art,when the micro-blower actuator of a single material is driven, thestructural strength and toughness thereof is insufficient, and it issusceptible to interference. In the embodiment, the material of thepiezoelectric thin plate 213 a or the piezoelectric thick plate 213 b isphosphor bronze. In another embodiment, the materials of thepiezoelectric thin plate 213 a and the piezoelectric thick plate 213 bare both phosphor bronzes, but each phosphor bronze has differentchemical composition, respectively. It is understandable that the twophosphor bronzes with different chemical compositions have differentthermal expansion coefficients, different flexibilities and differentrigidities.

Please refer to FIGS. 3 and 4, which are the views illustrating theassembly shown in FIGS. 1 and 2. Moreover, please refer to FIG. 5, whichis a schematic diagram showing the dimensions of the fluidtransportation actuator shown in FIG. 3. In the fluid transportationactuator 21 of the present disclosure, the piezoelectric thin plate 213a has at least one first side length L3 aWY and at least one second sidelength L3 aXZ. Preferably but not exclusively, the length of the atleast one first side length L3 aWY and the length of the at least onesecond side length L3 aXZ are the same. The piezoelectric thick plate213 b has at least one third side length L3 bWY and at least one fourthside length L3 bXZ. Preferably but not exclusively, the length of the atleast one third side length L3 bWY and the length of the at least onefourth side length L3 bXZ are the same. The piezoelectric element 213 chas at least one fifth side length L3 cWY and at least one sixth sidelength L3 cXZ. Preferably but not exclusively, the length of the atleast one fifth side length L3 cWY and the length of the at least onesixth side length L3 cXZ are the same.

In the embodiment, the piezoelectric thin plate 213 a has four sidelengths, which are two first side lengths L3 aWY and two second sidelengths L3 aXZ, respectively. Notably, the piezoelectric thin plate 213a may be square, but not limited thereto. In other embodiments, thepiezoelectric thin plate 213 a may be ring-shaped, circular, rectangularor polygonal. In the embodiment, the piezoelectric thick plate 213 b hasfour side lengths, which are two third side lengths L3 bWY and twofourth side lengths L3 bXZ, respectively. Notably, the piezoelectricthick plate 213 b may be square, but the present disclosure is notlimited thereto. In other embodiments, the piezoelectric thick plate 213b may be ring-shaped, circular, rectangular or polygonal. In theembodiment, the piezoelectric element 213 c has four side lengths, whichare two fifth side lengths L3 cWY and two sixth side lengths L3 cXZ,respectively. Notably, the piezoelectric element 213 c may be square,but not limited thereto. In other embodiments, the piezoelectric element213 c may be ring-shaped, circular, rectangular or polygonal. In theembodiment, the conductive frame 215 excluding the protrusion (Namely,the conductive-frame pin 215 e is excluded) has four side lengths, whichare two ninth side lengths LSWYB and two eighth side lengths LSXZ,respectively. Notably, the conductive frame 215 has the longest sidelength, which includes the protrusion and is a seventh side lengthL5WYA.

Please refer to FIG. 6, which shows the four corners of the fluidtransportation actuator shown in FIG. 3. In the fluid transportationactuator 21 of the present disclosure, the piezoelectric thin plate 213a includes at least one piezoelectric-thin-plate corner (R3 aN, R3 aO orR3 aP). Preferably but not exclusively, the at least onepiezoelectric-thin-plate conner (R3 aN, R3 aO or R3 aP) is a roundedcorner, and the rounded corner has a radius less then 2.0 mm. In theembodiment, the piezoelectric thin plate 213 a includes at least anotherpiezoelectric-thin-plate corner (R3 aM), which is a non-rounded corner.In the fluid transportation actuator 21 of the present disclosure, thepiezoelectric thick plate 213 b includes at least onepiezoelectric-thick-plate corner (R3 bM, R3 bN, R3 bO or R3 bP), the atleast one piezoelectric-thick-plate corner (R3 bM, R3 bN, R3 bO or R3bP) is a rounded corner, and the rounded corner has a radius less than2.0 mm. In the fluid transportation actuator 21 of the presentdisclosure, the piezoelectric element 213 c includes fourpiezoelectric-element corners (R3 cM, R3 cN, R3 cO and R3 cP), and thefour piezoelectric-element corners (R3 cM, R3 cN, R3 cO and R3 cP) aresquare corners.

In the embodiment, the piezoelectric element 213 c has four corners,which are the piezoelectric-element corner R3 cM, thepiezoelectric-element corner R3 cN, the piezoelectric-element corner R3cO and the piezoelectric-element corner R3 cP, respectively. All fourcorners of the piezoelectric element 213 c are square corners. Notably,the four corners of the piezoelectric element 213 c are adjustableaccording to the practical requirements. For example, part or all of thecorners of the piezoelectric element 213 c can be changed into squarecorners, bevel corners (single-edge corners) or polygonal corners. Inthe embodiment, the piezoelectric thick plate 213 b has four corners,which are the piezoelectric-thick-plate corner R3 bM, thepiezoelectric-thick-plate corner R3 bN, the piezoelectric-thick-platecorner R3 bO and the piezoelectric-thick-plate corner R3 bP,respectively. All four corners of the piezoelectric thick plate 213 bare rounded corners, and the rounded corner has a radius less than 2.0min. Notably, the four corners of the piezoelectric thick plate 213 bare adjustable according to the practical requirements. For example,part or all of the corners of the piezoelectric thick plate 213 b can bechanged into square corners, bevel corners (single-edge corners) orpolygonal corners. In the embodiment, the piezoelectric thin plate 213 ahas four corners, which are the piezoelectric-thin-plate corner R3 aM,the piezoelectric-thin-plate corner R3 aN, the piezoelectric-thin-platecorner R3 aO and the piezoelectric-thin-plate corner R3 aP. Notably, thepiezoelectric-thin-plate corner R3 aM of the piezoelectric thin plate213 a is a bevel corner. The piezoelectric-thin-plate conner R3 aN, thepiezoelectric-thin-plate conner R3 aO and the piezoelectric-thin-platecorner R3 aP of the piezoelectric thin plate 213 a are rounded corners,and the rounded corner has a radius less then 2.0 mm. The four cornersof the piezoelectric thin plate 213 a are adjustable according to thepractical requirements. For example, part or all of the corners of thepiezoelectric thin plate 213 a can be changed into rounded corners,bevel corners (single-edge corners) or polygonal corners. In theembodiment, the conductive frame 215 has four corners, which are theconductive-frame corner RSM, the conductive-frame corner RSN, theconductive-frame corner R50 and the conductive-frame corner RSP,respectively. Notably, the conductive-frame corner R5M of the conductiveframe 215 is a bevel corner. The conductive-frame corner RSN, theconductive-frame corner R50 and the conductive-frame corner R5P of theconductive frame 215 are rounded corners, and the rounded corner has aradius less then 2.0 mm. The four corners of the conductive frame 215are adjustable according to the practical requirements. For example,part or all of the corners of the conductive frame 215 can be changedinto rounded corners, bevel corners (single-edge corners) or polygonalcorners.

Please refer to FIG. 7, which is a cross-sectional view taken along thedash line AA in FIG. 6. Please refer to FIG. 8, which shows therespective dimensions of the piezoelectric thin plate 213 a, thepiezoelectric thick plate 213 b and the piezoelectric element 213 c inFIG. 6. In the fluid transportation actuator 21 of the presentdisclosure, the length of the first side length L3 aWY is greater thanthe length of the third side length L3 bWY. The length of the first sidelength L3 aWY is greater than the length of the fifth side length L3cWY. The length of the third side length L3 bWY is greater than or equalto the length of the fifth side L3 cWY. In the fluid transportationactuator 21 of the present disclosure, the length of the first sidelength L3 aWY and the length of the second side length L3 aXZ range from5.0 mm to 16.0 mm. In the fluid transportation actuator 21 of thepresent disclosure, the length of the third side length L3 bWY and thelength of the fourth side length L3 bXZ range from 3.5 mm to 9.5 mm. Inthe fluid transportation actuator 21 of the present disclosure, thelength of the fifth side length L3 cWY and the length of the sixth sidelength L3 cXZ range from 2.95 mm to 9.0 mm.

In the embodiment, the length of the first side length L3 aWY of thepiezoelectric thin plate 213 a is greater than the length of the thirdside length L3 bWY of the piezoelectric thick 213 b. The length of thefirst side length L3 aWY of the piezoelectric thin plate 213 a isgreater than or equal to the length of the fifth side length L3 cWY ofthe piezoelectric element 213 c. Notably, preferably but notexclusively, in the embodiment, the length of the first side length L3aWY and the length of the second side length L3 aXZ of the piezoelectricthin plate 213 a are the same, the length of the third side length L3bWY and the length of the fourth side length L3 bXZ of the piezoelectricthick plate 213 b are the same, the length of the fifth side length L3cWY and the length of the sixth side length L3 cXZ of the piezoelectricelement 213 c are the same, and the length of the ninth side lengthLSWYB and the length of the eighth side length LSXZ of the conductiveframe 215 are the same, but not limited thereto. In other embodiments,the length of the first side length L3 aWY and the length of the secondside length L3 aXZ of the piezoelectric thin plate 213 a are different,the length of the third side length L3 bWY and the length of the fourthside length L3 bXZ of the piezoelectric thick plate 213 b are different,the length of the fifth side length L3 cWY and the length of the sixthside length L3 cXZ of the piezoelectric element 213 c are different, andthe length of the ninth side length L5WYB and the length of the eighthside length L5XZ of the conductive frame 215 are different. Preferablybut not exclusively, the length of the third side length L3 bWY and thelength of the fourth side length L3 bXZ of the piezoelectric thick plate213 b are 8.40 mm. Preferably but not exclusively, the length of thefirst side length L3 aWY and the length of the second side length L3 aXZof the piezoelectric thin plate 213 a are 12.80 mm. Preferably but notexclusively, the length of the seventh side length L5WYA is 15.20 mm,but not limited thereto. In other embodiments, the lengths of the firstside length L3 aWY, the second side length L3 aXZ, the third side lengthL3 bWY, the fourth side length L3 bXZ, the fifth side length L3 cWY, thesixth side length L3 cXZ, the seventh side length L5WYA, the eighth sidelength L5XZ and the ninth side length L5WYB are adjustable according tothe practical requirements.

In the fluid transportation actuator 21 of the present disclosure, aratio of the length of the fifth side length L3 cWY to the length of thethird side length L3 bWY is in a range of 1:1 to 1:1.5. Namely, thelength of the fifth side length L3 cWY of the piezoelectric element 213c is less than or equal to the length of the third side length L3 bWY ofthe piezoelectric thick plate 213 b.

In the fluid transportation actuator 21 of the present disclosure, thepiezoelectric thick plate 213 b has a piezoelectric-thick-platethickness T3 b, and the piezoelectric-thick-plate thickness T3 b rangesfrom 0.05 mm to 0.5 mm. In the fluid transportation actuator 21 of thepresent disclosure, the piezoelectric thin plate 213 a has apiezoelectric-thin-plate thickness T3 a, and thepiezoelectric-thin-plate thickness T3 a ranges from 0.05 mm to 0.2 mm.The thickness of the actuator 213 is a combination of thepiezoelectric-thin-plate thickness T3 a of the piezoelectric thin plate213 a, the piezoelectric-thick-plate thickness T3 b of the piezoelectricthick plate 213 b and the piezoelectric-element thickness T3 c of thepiezoelectric element 213 c. Preferably but not exclusively, thepiezoelectric-thick-plate thickness T3 b ranges from 0.05 to 0.5 mm, thepiezoelectric-thin-plate thickness T3 a ranges from 0.05 to 0.2, and thepiezoelectric-thick-plate thickness T3 b is thicker than thepiezoelectric-thin-plate thickness T3 a.

In summary, the present disclosure provides a fluid transportationactuator. Through the design of the piezoelectric thin plate andpiezoelectric thick plate of the actuator made of metals with differentthermal expansion coefficients, different flexibilities and differentrigidities, the driving impedance of the conventional single-materialfluid transportation actuator is improved. It prevents the drivingfrequency from offset result from the adjacent resonance frequencies.The structural strength and toughness is enhanced by utilizing thematerial of phosphor bronze. Moreover, with the design of the roundedcorners in the piezoelectric thick plate, the physical damage to thepiezoelectric thin plate is also reduced.

While the disclosure has been described in terms of what is presentlyconsidered to be the most practical and preferred embodiments, it is tobe understood that the disclosure needs not be limited to the disclosedembodiments. On the contrary, it is intended to cover variousmodifications and similar arrangements included within the spirit andscope of the appended claims which are to be accorded with the broadestinterpretation so as to encompass all such modifications and similarstructures.

1. A fluid transportation actuator, comprising: a silencing jet orificeplate, comprising; a silencing plate; a suspension plate permitted toundergo a bending vibration; and a central aperture formed on a centerof the suspension plate, wherein the silencing plate is disposed andfixed on the central aperture disposed at the center of the suspensionplate; a chamber frame carried and stacked on the suspension plate; anactuator carried and stacked on the chamber frame, wherein the actuatorgenerates the bending vibration in a reciprocating manner as a voltageis applied thereto; an insulation frame carried and stacked on theactuator; and a conductive frame carried and stacked on the insulationframe, and comprising a conductive-frame pin, wherein a resonancechamber is collaboratively defined by the actuator, the chamber frameand the silencing jet orifice plate, wherein when the silencing jetplate orifice is driven by the actuator in resonance, the suspensionplate of the silencing jet orifice plate is vibrated and displaced inthe reciprocating manner, so as to achieve fluid transportation.
 2. Thefluid transportation actuator according to claim 1, wherein the actuatorcomprises: a piezoelectric thin plate carried and stacked on the chamberframe; a piezoelectric thick plate carried and stacked on thepiezoelectric thin plate; and a piezoelectric element is carried andstacked on the piezoelectric thick plate, wherein the piezoelectricelement drives the piezoelectric thin plate and the piezoelectric thickplate as the voltage applied, and generates the bending vibration in thereciprocating manner.
 3. The fluid transportation actuator according toclaim 2, wherein the piezoelectric thin plate and the piezoelectricthick plate are made of two metals having different thermal expansioncoefficients, two different flexibilities and two different rigidities,and both are not stainless steel.
 4. The fluid transportation actuatoraccording to claim 3, wherein the piezoelectric thin plate has at leastone first side length and at least one second side length, and thelength of the at least one first side length and the length of the atleast one second side length are the same; wherein the piezoelectricthick plate has at least one third side length and at least one fourthside length, and the length of the at least one third side length andthe length of the at least one fourth side length are the same; whereinthe piezoelectric element has at least one fifth side length and atleast one sixth side length, and the length of the at least one fifthside length and the length of the at least one sixth side length are thesame.
 5. The fluid transportation actuator according to claim 4, whereinthe length of the at least one first side length is greater than thelength of the at least one third side length, the length of the at leastone first side length is greater than the length of the at least onefifth side length, and the length of the at least one third side lengthis greater than or equal to the length of the at least one fifth side.6. The fluid transportation actuator according to claim 5, wherein aratio of the length of the at least one fifth side length to the lengthof the at least one third side length is in a range of 1:1 to 1:1.5. 7.The fluid transportation actuator according to claim 5, wherein thelength of the at least one first side length and the length of the atleast one second side length range from 5.0 mm to 16.0 mm.
 8. The fluidtransportation actuator according to claim 5, wherein the length of theat least one third side length and the length of the at least one fourthside length range from 3.5 mm to 9.5 mm.
 9. The fluid transportationactuator according to claim 5, wherein the length of the at least onefifth side length and the length of the at least one sixth side lengthrange from 2.95 mm to 9.0 mm.
 10. The fluid transportation actuatoraccording to claim 3, wherein the piezoelectric thin plate comprises atleast one piezoelectric-thin-plate corner, the at least onepiezoelectric-thin-plate corner is a rounded corner, and the roundedcorner has a radius less than 2.0 mm, wherein the piezoelectric thinplate comprises at least another piezoelectric-thin-plate corner, whichis a non-rounded corner.
 11. The fluid transportation actuator accordingto claim 3, wherein the piezoelectric thick plate comprises at least onepiezoelectric-thick-plate corner, the at least onepiezoelectric-thick-plate corner is a rounded corner, and the roundedcorner has a radius less than 2.0 mm.
 12. The fluid transportationactuator according to claim 11, wherein the piezoelectric thick platehas a piezoelectric-thick-plate thickness, and thepiezoelectric-thick-plate thickness ranges from 0.05 mm to 0.5 mm. 13.The fluid transportation actuator according to claim 3, wherein thepiezoelectric element comprises four piezoelectric-element corners, andthe four piezoelectric-element corners are square corners.
 14. The fluidtransportation actuator according to claim 13, wherein the piezoelectricthin plate has a piezoelectric-thin-plate thickness, and thepiezoelectric-thin-plate thickness ranges from 0.05 mm to 0.2 mm.